Design and fabrication of a series contact RF MEMS switch with a novel top electrode

Radio-frequency (RF) micro-electro-mechanical-system (MEMS) switches are widely used in communication devices and test instruments. In this paper, we demonstrate the structural design optimization of a novel RF MEMS switch with straight top electrode. The insertion loss, isolation, actuator voltage, stress distribution optimized explored simultaneously by HFSS COMSOL software, taking into account both its mechanical properties. Based on results, was fabricated micromachining process compatible conventional IC processes. performance DC to 18 GHz range measured vector network analyzer, showing isolation more than 21.28 dB over entire operating frequency range. Moreover, required actuation voltage about 9.9 V, switching time approximately 33 μs. A maximum lifetime 10 9 cycles obtained. Additionally, dimension sample is 1.8 mm × 0.3 mm, which might find application current stage.